LAMINATED STRUCTURE OF PIEZOELECTRIC NANOWIRE AND MANUFACTURING METHOD THEREFORE

摘要

A laminated structure of a piezoelectric nanowire comprises: a first conductive layer (201); a piezoelectric layer (202) on the first conductive layer (201), the piezoelectric layer (202) comprising a stack formed by multiple piezoelectric nanowires (202i); and a second conductive layer (203) on the piezoelectric layer (202). Multiple piezoelectric nanowires are stacked to form the piezoelectric layer, so that a structure of piezoelectric nanowires connected in series is formed and outputs a higher voltage when being bent under pressure because voltages generated by the piezoelectric effect thereof are in a series connection. Further, the first conductive layer and the second conductive layer facilitate lead-out of piezoelectric signals, and protect the piezoelectric layer, thereby facilitating application of the laminated structure of the piezoelectric nanowire to the manufacturing of various devices.