| 摘要 |
The invention presents a method for producing microstructured apparatuses for microelectromechanical systems (MEMS). In order to increase the maximum aspect ratio conditioned by physical or chemical microstructuring methods, it is proposed to design flat elements of the apparatus, which are structured such that they are movable relative to one another, to be laterally changeable from a first reference position relative to one another (structuring position) to a second reference position (operating position) in a permanent or irreversible manner. As a result, higher trench capacitances can be formed between structured wall sections. The reference position can be changed by means of integrated drives or by supplying energy from the outside and said change is effected in a direction which is substantially different from the measuring direction. In addition to mechanical work and energy from electrical or magnetic fields, heat can be used to shift location in drives as a result of the action of force on an element or induced changes in length. This method makes it possible to produce highly sensitive sensors for very small excitation signals or to produce economical actuators with an extremely high level of efficiency in the form of low-attenuation, area-optimized, highly capacitive converters, as well as variable vertical capacitors with a high capacitance.
|
