| 摘要 |
<p>PURPOSE: An apparatus for forming a CIGS(Cu In1-x Gax Se2) layer is provided to prevent the deformation of a chamber by forming an inner wall and a corner which have round edge parts. CONSTITUTION: A wall(110) includes a rectangular inner wall(111) and an outer wall. A gateway is formed in the lower side of the inner wall. The outer wall covers the upper and side parts of the inner wall. A door(121) opens the gateway. The edges of the upper and side parts are rounded.</p> |
