| 摘要 |
PURPOSE: A flexible pH sensor is provided to facilitate the insertion into the blood vessels, and to minimize the blood vessel damage by comprising flexible materials having biocompatibility. CONSTITUTION: A flexible pH sensor(100) comprises a substrate(110), a reference electrode(120), a working electrode(130), and ISFET(Ion-Selective Field Effect Transistor)(140). The substrate has the biocompatibility, and is made of flexible materials. The substrate is formed with the width and length of 300um to 500um, respectively. The reference electrode and the working electrode are formed by photolithography and a lift-off process on the substrate, and perform the pH measurement in the blood vessels. The ISFET is formed between the reference electrode and the working electrode, and the two electrodes are in a semiconductor electrode form.
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