发明名称 |
SEPARATION SYSTEM, SEPARATION METHOD, PROGRAM AND COMPUTER STORAGE MEDIUM |
摘要 |
The present invention is used for separating a superposed substrate in which a processing target substrate and a supporting substrate are joined together with an adhesive into the processing target substrate and the supporting substrate, and includes: a separation processing station performing predetermined processing on the processing target substrate, the supporting substrate, and the superposed substrate; a transfer-in/out station transferring the substrates into/from the separation processing station; and a transfer unit transferring the substrates between the separation processing station and the transfer-in/out station, wherein the separation processing station includes: a separation unit separating the superposed substrate into the processing target substrate and the supporting substrate; a first cleaning unit cleaning the processing target substrate separated in the separation unit; and a second cleaning unit cleaning the supporting substrate separated in the separation unit.
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申请公布号 |
US2013146229(A1) |
申请公布日期 |
2013.06.13 |
申请号 |
US201113818150 |
申请日期 |
2011.03.04 |
申请人 |
HIRAKAWA OSAMU;YOSHITAKA NAOTO;MATSUNAGA MASATAKA;OKAMOTO NORIHIKO;TOKYO ELECTRON LIMITED |
发明人 |
HIRAKAWA OSAMU;YOSHITAKA NAOTO;MATSUNAGA MASATAKA;OKAMOTO NORIHIKO |
分类号 |
H01L21/02 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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