CONTACT PROBE AND SOCKET FOR SEMICONDUCTOR ELEMENT PROVIDED WITH SAME

摘要

One purpose of the present invention is to provide a contact probe, and a socket for a semiconductor element provided with the contact probe for which conductor resistance is lowered and the amount of heat generated is reduced. A contact probe (10) is provided with a first plunger (12) having an upper contactor (14), a distal end of which is in contact with an electrode section of a semiconductor element; a second plunger (13) having a lower contactor (15) in contact with an electrode section of a substrate for inspection; and a coil spring (18) for urging the first plunger (12) and the second plunger (13) in a direction away from each other. At least the first plunger (12) and the second plunger (13) have a three-layered plating layer comprising an underlayer (22), an interlayer (23), and an outermost layer (24) on the surface of a base material (21). The interlayer (23) has a smaller volume resistivity than that of the outermost layer (24) and the outermost layer (24) has a higher degree of hardness than that of the interlayer (23).