发明名称 |
LASER APPARATUS, EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM, METHOD FOR CONTROLLING THE LASER APPARATUS, AND METHOD FOR GENERATING THE EXTREME ULTRAVIOLET LIGHT |
摘要 |
A laser apparatus may include: a master oscillator configured to output a pulsed laser beam at a repetition rate, the master oscillator including at least one semiconductor laser apparatus; at least one amplifier configured to amplify the pulsed laser beam from the master oscillator, the at least one amplifier being configured to include at least one gain bandwidth; and a controller for controlling a parameter affecting an output wavelength of the pulsed laser beam from the master oscillator such that a wavelength chirping range of the pulsed laser beam from the master oscillator overlaps at least a part of the at least one gain bandwidth. |
申请公布号 |
US2013148674(A1) |
申请公布日期 |
2013.06.13 |
申请号 |
US201213817817 |
申请日期 |
2012.01.25 |
申请人 |
NOWAK KRZYSZTOF;WAKABAYASHI OSAMU;GIGAPHOTON INC. |
发明人 |
NOWAK KRZYSZTOF;WAKABAYASHI OSAMU |
分类号 |
H01S5/06 |
主分类号 |
H01S5/06 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|