发明名称 SEMICONDUCTOR ON INSULATOR STRUCTURE WITH IMPROVED ELECTRICAL CHARACTERISTICS
摘要 A semiconductor structure (1300) comprising a first semiconductor layer, a bulk semiconductor layer, an insulation layer between the first semiconductor layer and the bulk semiconductor layer, a first implanted region (1220) that is at least partially within the insulation layer; and a second doped region (1310) that is at least partially within the bulk semiconductor layer, wherein the first implanted region (1220) has an implant profile that shows a maximum within the insulation layer and a tail extending within the bulk semiconductor layer so as to inhibit the diffusion of a second doping material of the second doped region (1310) within the insulation layer.
申请公布号 WO2013084035(A1) 申请公布日期 2013.06.13
申请号 WO2012IB02349 申请日期 2012.11.13
申请人 SOITEC 发明人 BOURDELLE, KONSTANTIN
分类号 H01L21/762;H01L29/786 主分类号 H01L21/762
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