| 摘要 |
PURPOSE: A vibration control device is provided to vary a damping force according to the size of the vibration or an external force input from the outside. CONSTITUTION: A vibration control device comprises a lower body(1), an upper body(2), a partition(3), a support plate(4), a support plate flowing shaft(5), a pressure controller(7), and a damping member(8). The partition is fixed to a gap between a flange(17) of the upper and lower bodies and flows by the pressure of a chamber(11). The support plate is positioned on an upper part of the upper body and supports the lower end of a table(T) in which the device is settled. The support plate flowing shaft moves with the partition by being fixed on the partition and one end is connected to the lower end of the support plate and the other end is positioned inside the lower body by penetrating through the partition. The pressure controller supplies gas inside the lower body and controls the movement of the partition and pressure inside the chamber. The damping member suppresses the movement of the support plate flowing shaft according to the flow of the partition with a magnetic force.
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