| 摘要 |
PURPOSE: A positioning apparatus is provided to improve precision by using a vertical movement device. CONSTITUTION: Two or more wedge block modules(50) are installed in a driving plate. The wedge block modules change the horizontal movement to the vertical movement. An elevating driver(40) includes a drive motor. The drive motor delivers horizontal force to the wedge block modules. An object stage(70) is supported by the wedge block modules.
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