发明名称 |
FLUID PRESSURE SENSOR AND MEASUREMENT PROBE |
摘要 |
This invention concerns a fluid pressure measurement sensor (11) comprising a microelectromechanical system (MEMS) chip (23). The MEMS chip (23) comprises two lateral walls (56), a sensitive membrane (49) connected to said lateral walls (56) and sealed cavity (9). The exterior surfaces of the lateral walls (56) and the sensitive membrane (49) are exposed to the fluid pressure. The lateral walls (56) are designed to subject the sensitive membrane (49) to a compression stress transmitted by the opposite lateral walls (56) where said lateral walls (56) are connected to the sensitive membrane (49) such that the sensitive membrane (49) works in compression only. The MEMS chip (23) also comprises a stress detection circuit (31) to measure the compression state of the sensitive membrane (49) which is proportional to the fluid pressure. |
申请公布号 |
CA2858146(A1) |
申请公布日期 |
2013.06.13 |
申请号 |
CA20122858146 |
申请日期 |
2012.12.07 |
申请人 |
OPENFIELD |
发明人 |
DONZIER, ERIC;TAVERNIER, EMMANUEL |
分类号 |
G01L9/00 |
主分类号 |
G01L9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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