NOISE CHARACTERISTIC ANALYSIS METHOD FOR X-RAY FLUORESCENCE SPECTRUM

摘要

PURPOSE: A method for analyzing noise properties of a fluorescence X-ray spectrum is provided to improve the accuracy of an analysis of the fluorescence X-ray spectrum by analyzing noise properties. CONSTITUTION: A method for analyzing noise properties of a fluorescence X-ray spectrum is as follows. A fluorescence X-ray detector irradiates X-rays to a reference sample in which preset substances are mixed at a preset rate for analyzing noise properties of the fluorescence X-ray spectrum, sorts the fluorescence X-ray energy generated from the sample for a predetermined period into a plurality of channels according to an energy level for a predetermined period, and counts the sorted channels. The process obtaining the fluorescence X-ray spectrum is repeated several times. The number that the fluorescence X-ray energy with respect to each of the channels is actually counted is substituted to a Poisson distribution function so that the probability that an expected count number is observed for the predetermined period is calculated. The standard deviation of the count number is calculated.