| 摘要 |
<p>A liquid jetting head comprising:a substrate (20) formed with a pressure chamber (21), a diaphragm (30) formed on the substrate (20), and a piezoelectric thin film element (40) formed on the diaphragm (30).The piezoelectric thin film element (40) has a piezoelectric thin film (43) constituted by PZT with a degree of (100) face orientation of at least 70%, said diaphragm (30) bends in convex form toward said pressure chamber side, and the amount by which said diaphragm bends is no more than 0.4% of the width of said pressure chamber (21), and the amount by which diaphragm (30) bends is the amount measured after voltage application to the piezoelectric thin film (43).</p> |
