RETAINER RING STRUCTURE FOR CHEMICAL-MECHANICAL POLISHING MACHINE AND MANUFACTURING MATHOD THEREOF

摘要

PURPOSE: A retainer ring structure for a chemical-mechanical polishing machine and a manufacturing method thereof are provided to reduce a failure by using high strength metal formed in a fixing screw region. CONSTITUTION: A hole(15) is formed on the upper surface of an insertion ring(14). The insertion ring is made of at least two kinds of metals. An insertion pin(16) is combined with the hole. The insertion pin is made of a different material from the insertion ring. An outer ring surrounds the insertion ring.