ELECTRODES CONNECTING STRUCTURES HAVING COPPER

摘要

PURPOSE: An electrode connection structure is provided to reduce thickness by integrating an upper electrode with a lower electrode. CONSTITUTION: A lower device(101) has a lower electrode structure(151A). The lower electrode structure includes a lower electrode barrier layer(131A) and a lower metal electrode(141A). An upper part device(102) has an upper electrode structure(152A). The upper electrode structure includes an upper electrode barrier layer(132A) and an upper metal electrode(142A). The lower is electrically connected to the upper device by the electrode structure(150A).