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发明名称
摘要
申请公布号	JP5209716(B2)	申请公布日期	2013.06.12
申请号	JP20100517806	申请日期	2009.04.10
申请人		发明人
分类号	G01C19/5677;H01L41/08;H01L41/22	主分类号	G01C19/5677
代理机构		代理人
主权项
地址

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