| 摘要 |
Provided is a substrate storage container in which the center of gravity is suppressed to be biased to a lid side so that inclination toward the lid side is prevented, and conveyance and the like in a stable posture is able to be performed. The substrate storage container is provided with a container body 1 for aligning and storing a plurality of sheets of semiconductor wafers, and a lid for detachably opening/closing an open front of the container body 1, in which a robotic flange for conveyance is attached on a substantially center portion of a ceiling 5 of the container body 1, in which heavy gravity center position adjustment means 40 is provided at a rear portion of the container body 1 such as on a rear wall 7, a side wall 10 rear portion so that inclination of the substrate container body toward the lid side is regulated with the gravity center position adjustment means 40. The gravity center position adjustment means 40 is positioned at the rear portion of the container body 1 to function as a counterweight, so that it is possible to suppress that a position of the center of gravity of the substrate storage container storing the semiconductor wafer falls within an acceptable range which is within + 35 mm from a center position of the semiconductor wafer. |
