| 摘要 |
PURPOSE: A double pickup cylinder for a semiconductor device is provided to prevent a semiconductor device from shaking in a transfer process by including a guide block. CONSTITUTION: First and second vacuum shafts(20) vertically move and vacuum-suctions a semiconductor device. First and second piston rods(30) vertically move with pressure and transfer the first and second vacuum shafts. The first and second vacuum shafts are received in a connector(40) and supports the vertical movement of the first and second vacuum shafts. A guide block stably secures the vertical movement of the connector on both sides of a cylinder body. |
