| 摘要 |
<p>The device has an illuminating light (3) of a light source (2) and an optical assembly group (28) for adjustment of an illumination setting in a pupil level (12) of the illuminating lens. Another optical assembly group (29) separated from former optical assembly group for adjustment of another illumination setting in the pupil level of the illuminating lens. A linking component (35) arranged in the optical path after both optical assembly groups supplies the illuminating light, which has passed the former assembly group or the latter optical assembly group, to the illuminating field. Independent claims are also included for the following: (1) an illumination system with an illuminating lens (2) a method for micro-lithographic production of micro-structured elements (3) an extension module for illuminating lens.</p> |
