| 摘要 |
<p>A method of investigating a sample using a charged-particle microscope, comprising the steps of:
- Providing a charged-particle microscope having a particle-optical column and a sample holder;
- Mounting the sample to the sample holder;
- Using the particle-optical column to direct an imaging beam of charged particles at the sample;
- Irradiating the sample with the imaging beam, as a result of which a flux of output radiation is caused to emanate from the sample;
- Capturing at least a portion of said output radiation using a detector;
- Constructing an image of at least a portion of said sample using data output from said detector,
which method comprises the following additional steps:
- Identifying at least one imaging parameter that affects a quality of said image and that can be altered by adjusting an operational setting (O) of the microscope;
- For each such imaging parameter, selecting a quantifiable metric (M) whose value is representative of said imaging parameter;
- For each such metric, rendering in a user interface a value of said metric as a function of said operational setting;
- Using said rendition to manually adjust said operational setting (O) so as to select a particular value (*) of said metric (M) and, accordingly, of the corresponding imaging parameter.</p> |
