发明名称
摘要 A region-divided substrate includes: a substrate having a first surface and a second surface opposite to the first surface and having a plurality of partial regions, which are divided by a plurality of trenches, wherein each trench penetrates the substrate from the first surface to the second surface; a conductive layer having an electrical conductivity higher than the substrate and disposed on a sidewall of one of the plurality of partial regions from the first surface to the second surface; and an insulator embedded in each trench.
申请公布号 JP5206826(B2) 申请公布日期 2013.06.12
申请号 JP20110048074 申请日期 2011.03.04
申请人 发明人
分类号 H01L21/76;B81B3/00;B81C3/00;G01P15/125;H01L21/02;H01L21/3205;H01L21/768;H01L21/822;H01L23/52;H01L23/522;H01L27/00;H01L27/04;H01L27/12;H01L29/84 主分类号 H01L21/76
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