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发明名称
METHOD AND APPARATUS FOR PURIFICATION OF TRICHLOROSILANE
摘要
申请公布号
EP2520546(A4)
申请公布日期
2013.06.12
申请号
EP20100841217
申请日期
2010.12.27
申请人
LG CHEM, LTD.
发明人
CHOI, CHUL-HWAN;LEE, JEONG-SEOK;CHOI, KWANG-WOOK;SHIN, JOON-HO;KIM, DONG-KYU
分类号
C01B33/107
主分类号
C01B33/107
代理机构
代理人
主权项
地址
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