| 摘要 |
PURPOSE: A laser trimming method for a resistor is provided to reduce an allowable error range and the number of processes by processing resisters to a trimming length close to a target resistance value according to a correlation formula. CONSTITUTION: A laser trimming method for a resistor comprises the steps of: measuring the initial resistance value of test resistors processing the resistors to a predetermined trimming length, repeating the mentioned steps and repetitively measuring the final resistance value of the trimmed resisters, setting the final resistance value as a target resistance value, calculating a dimensionless resistance value indicating the difference of the initial resistance value from the final resistance value, as a ratio of the initial resistance value, and drawing a correlation formula to express the trimming length in a function for the dimensionless resistance value. |
