发明名称 RESIN MOLD FOR NANOIMPRINTING
摘要 Disclosed is a resin mold for nanoimprinting, which has a resin layer having fine depressions and protrusions formed on the surface and is characterized in that the resin layer is formed from 1 to 49 parts by weight of a silicone-based macromonomer and/or a fluorine-based macromonomer and 99 to 51 parts by weight of at least one polymerizable monomer selected from the group consisting of a (meth) acrylic monomer, a styrene-based monomer, an epoxy-based monomer, an olefin-based monomer and a polycarbonate-based resin-forming monomer, the silicone-based macromonomer and/or the fluorine-based macromonomer has a molecular weight of 600 to 10000 and has, at an end of molecule, a reactive group copolymerizable with the polymerizable monomer, and when the reactive group is copolymerized with the polymerizable group, silicone-based units or fluorine-based units that constitute the macromonomer form side chains on a trunk polymer formed from the polymerizable monomer and the macromonomer.
申请公布号 EP2602088(A1) 申请公布日期 2013.06.12
申请号 EP20110814668 申请日期 2011.08.03
申请人 SOKEN CHEMICAL & ENGINEERING CO., LTD. 发明人 UEHARA, SATOSHI;MIZAWA, TAKAHIDE
分类号 B29C59/02;B29C33/40;B29K27/12;B29K83/00;G03F7/00;H01L21/027 主分类号 B29C59/02
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