发明名称 |
ROTATIONAL MISALIGNMENT MEASURING DEVICE OF BONDED SUBSTRATE, ROTATIONAL MISALIGNMENT MEASURING METHOD OF BONDED SUBSTRATE, AND METHOD OF MANUFACTURING BONDED SUBSTRATE |
摘要 |
PURPOSE: A rotational misalignment measuring device of a bonded substrate, a rotational misalignment measuring method of the bonded substrate, and a method for manufacturing the bonded substrate are provided to accurately control the deviation of a notch position. CONSTITUTION: A center position deviation acquisition part acquires a center position deviation value. A notch shape acquisition part(200) acquires the topology data of a notch. A notch position deviation output part(210) calculates a notch position from the topology data of the notch. The notch position deviation output part calculates the amount of deviation of the notch position. A rotation deviation output part(220) calculates the amount of rotation deviation between each substrate. [Reference numerals] (1) Rotational misalignment measuring device; (2) Center position misalignment measuring device; (200) Notch shape acquisition part; (210) Notch position deviation output part; (220) Rotation deviation output part; (230) I/F part; (240) Control part
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申请公布号 |
KR20130062247(A) |
申请公布日期 |
2013.06.12 |
申请号 |
KR20120137891 |
申请日期 |
2012.11.30 |
申请人 |
KABUSHIKI KAISHA KOBE SEIKO SHO;KOBELCO RESEARCH INSTITUTE, INC. |
发明人 |
KANNAKA MASATO;KAJITA MASAKAZU;TAKAHASHI EIJI;YAMAMOTO YUJI;AKAMATSU MASARU;IBA KUNIO;IMANISHI KENJI |
分类号 |
H01L21/66;H01L21/02 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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