| 摘要 |
PURPOSE: A drawing device, a data processing unit for the same, and a method for generating drawing data for the same are provided to generate drawing data precisely corresponding to the change of a substrate by adopting different mesh regions according to the degree of change of the substrate. CONSTITUTION: A data processing unit(2) generates drawing data(DD). A data conversion unit(21) obtains pattern data(DP) and converts the pattern data into initial drawing data(D1). A data division unit(22) generates divided drawing data(D2). A reference location specifying unit(23) generates reference position data(DS) by corresponding a reference position to a mesh region. A data synthesizing unit(24) generates the drawing data by synthesizing the contents of each mesh region. |
