发明名称 METHOD FOR FORMING PATTERN USING JOULE HEAT
摘要 <p>PURPOSE: A patterning method using joule heat is provided to perform a patterning process without using a complicated and expensive apparatus. CONSTITUTION: A coating layer(200) is formed in a substrate(100). The coating layer is made of a hardening material. The coating layer includes Ag, Cu, Ni, Au, or Al. The coating layer is selectively hardened by applying joule heat to the coating layer. The hardened region of the coating layer is left by removing the other region of the coating layer. [Reference numerals] (AA) Joule's heat</p>
申请公布号 KR20130061918(A) 申请公布日期 2013.06.12
申请号 KR20110128238 申请日期 2011.12.02
申请人 HOSEO UNIVERSITY ACADEMIC COOPERATION FOUNDATION 发明人 MOON, CHEOL HEE
分类号 H01L21/027 主分类号 H01L21/027
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