CLEANING OF ELECTROSTATIC CHUCKS USING ULTRASONIC AGITATION AND APPLIED ELECTRIC FIELDS,申请号EP20060845188-传众专利搜索

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发明名称	CLEANING OF ELECTROSTATIC CHUCKS USING ULTRASONIC AGITATION AND APPLIED ELECTRIC FIELDS
摘要
申请公布号	EP2024108(A4)	申请公布日期	2013.06.12
申请号	EP20060845188	申请日期	2006.12.11
申请人	LAM RESEARCH CORPORATION	发明人	STEGER, ROBERT, J.
分类号	B08B3/12	主分类号	B08B3/12
代理机构		代理人
主权项
地址

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