| 摘要 |
PURPOSE: An autofocusing device of electric optical imaging equipment and an autofocusing method thereof are provided to calculate a defocus size by directly measuring the optical guide surface phase information of light which is incident to the optical system, to confirm a focal state, and to rapidly adjust focus of the electric optical imaging equipment. CONSTITUTION: An autofocusing device of electric optical imaging equipment(20) comprises a Shack Hartmann wavefront sensor(10), an optical system(21), a space filter(17), and an imaging equipment signal processing unit. The Shack Hartmamn wavefront sensor obtains a point light source which forms a plurality of point images from a complex optical image of a target(50). The defocus size of the Shack Hartmann wavefront sensor is calculated by obtaining a partial inclination of a light guide surface which forms the point light force based on the displacement of the point image with a phase value simultaneously. The optical system includes a focal adjusting lens(22), a lens adjusting device(24), and a plane mirror(25). The space filter is installed at a position where an optical passage changed in the plane mirror is connected to the wavefront sensor. The imaging equipment signal processing unit is connected to imaging equipment detecting unit(28) which detects an image phase fallen on a focal surface(26) of the imaging equipment by being arranged in the rear side of the focal surface. |
