发明名称 |
Surface inspection tool and surface inspection method |
摘要 |
A surface inspection tool 110 measures scattering light intensity of scattering light generated by irradiated irradiation light in association with a measurement coordinate on a wafer 200 with patterns and inspects the surface roughness of the wafer 200. The surface inspection tool includes a controller 250 which extracts measurement coordinate of the measured scattering light intensity that is equal to or more than a lower limit threshold L, sets an inspection range 406 of the surface roughness inspection in a partial layout 405a of a part of the whole layout 401 of the pattern corresponding to the periphery of the extracted measurement coordinate, and obtains the surface roughness in the inspection range 406.
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申请公布号 |
US8462352(B2) |
申请公布日期 |
2013.06.11 |
申请号 |
US201213450226 |
申请日期 |
2012.04.18 |
申请人 |
MIYOSHI YUJI;FUNAKOSHI TOMOHIRO;HITACHI HIGH-TECHNOLOGIES CORPORATION |
发明人 |
MIYOSHI YUJI;FUNAKOSHI TOMOHIRO |
分类号 |
G01B11/30 |
主分类号 |
G01B11/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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