JIG FOR USING ETCHING, AND CHEMICAL LIFT OFF APPARATUS COMPRISING THE SAME

摘要

PURPOSE: An etching jig and a chemical lift-off apparatus including the same are provided to improve throughput by preventing etching in an unnecessary region. CONSTITUTION: A frame body receives a semiconductor structure(10). An etching hole(121) is formed in an upper part of the frame body. The frame body exposes the upper part of a substrate. A sealing member(150) is arranged in the frame body. The sealing member encapsulates a semiconductor thin film and a support layer.