PROBE FILM USED PROBE BLOCK AND METHOD FOR MANUFACTURING THERE OF

摘要

PURPOSE: A probing film for probe blocks and a manufacturing method thereof are provide to extend the life span of a product and to quickly and accurately test the product by decreasing damage to a probe. CONSTITUTION: A manufacturing method of a probe film for a probe block includes the following steps of: probe part formation (S1000) which forms multiple probe parts on a substrate at planned intervals en bloc including a contact bump each equipped with a signal line section, a central section made of a conductive part and protruded from the signal line section, and a supporting section made of a conductive layer around the central section using photolithography; film attachment (S3000) which attaches the upper layer of the probe part to a film; substrate removal (S5000) which eliminates the substrate; and partial removal of the bottom part of the contact bump (S7000) which exposes the central section to the outside to contact with an electrode on a display panel. In the probe formation step, the supporting part of the contact bump is formed with a first conductive material and the central section is formed a the second conductive material. [Reference numerals] (AA) Start; (BB) End; (S1000) Probe part formation step in which photolithography forms multiple probe parts including a signal line section and a contact bump respectively; (S3000) Film attachment step in which film section attaches upper layer of the probe part; (S5000) Step of eliminating substrate; (S7000) Step of partial removal of the bottom part of the contact bump