| 摘要 |
PURPOSE: A gas scrubber is provided to cool process gas as not a direct cooling type scrubber but a heat-exchange type scrubber using cooling water in a semiconductor process line by directly cooling water injection. CONSTITUTION: A gas scrubber includes the following: a burning chamber(100) combusting toxic or explosive process gas; a cooling chamber(300) cooing the combusted process gas; a drain chamber(400) storing foreign materials or moisture generated in a process; and a gas inlet(101) formed on the top of the burning chamber. A gas guide pipe(310) is installed at a fixed interval inside the cooing chamber. A first absorber(330) is installed at a location corresponding to the bottom of the cooling chamber. The drain chamber has a water level sensor(410) and a drain pump(420). An auxiliary cooling chamber comprises a gas cooling line(510) and a cooling water discharge line(530). |
