IN-LINE TYPE BAKING APPATATUS HAVING PLASMA TREATMENT PART

摘要

PURPOSE: An in-line type baking apparatus including a plasma treatment part is provided to reduce a process failure by performing a plasma process in the same apparatus as a bake apparatus. CONSTITUTION: An input part injects an object. An input robot supplies the object to the inlet of a chamber. A buffer part(4) keeps the ejected object for preset time. A plasma part(5) processes the object with plasma. A discharge robot(7) moves the object to the plasma part.