| 摘要 |
PURPOSE: A hybrid laser processing apparatus using a vibrating element is provided to control the processing depth of a work piece according to the vibrating range of a vibrating element of an optical system. CONSTITUTION: A hybrid laser processing apparatus comprises a laser source(110), a beam splitter(120), an objective lens(130), a stage(140), and a vibrating element(160). The laser source generates ultra-short pulse laser beams. The beam splitter divides the laser beams generated by the laser source and transmits the split beams to a work piece. The objective lens concentrates the beams transmitted from the beam splitter to a target portion of the work piece. The stage, on which the work piece is placed, can be moved in x-, y-, and z-axis directions by a control unit(150). The vibrating element is connected to the objective lens and controlled by the control unit to apply vibration to the objective lens. |
