| 摘要 |
A cassette cleaning apparatus is provided to reduce a processing time, to improve the yield and to decrease an occupational area of the apparatus itself by performing simultaneously drying and inspecting processes on a cassette using a dry and inspection integrated chamber composed of a hot blast line and a plurality of sensors. A cassette cleaning apparatus includes a cleaning chamber, and a dry and inspection integrated chamber. The cleaning chamber includes a nozzle. The dry and inspection integrated chamber is discretely added to the cleaning chamber. The dry and inspection integrated chamber includes a hot blast line(121) and a plurality of sensors(135). |
