| 摘要 |
An apparatus for measuring a shape of a surface, comprises a measurement head which measures a direction of a normal from the surface to a reference point by detecting test light obtained when light that passes through the reference point is emitted, is reflected by the surface, and returns to the reference point, a scanning mechanism which scans the measurement head, and a processor which calculates the shape of the surface based on the direction of the normal measured using the measurement head and a position of the reference point.
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