| 摘要 |
PURPOSE: An injection unit is provided to discharge photoresist under constant pressure and to prevent the downward drop of photoresist from a nozzle due to the unstable suck-back of photoresist. CONSTITUTION: An injection unit includes a nozzle(920), a chemicals supplying line(918), a suck-back valve(917), and a sensor(930). The nozzle discharges chemicals on a substrate. The chemicals supplying line supplies chemicals through a nozzle. The suck-back valve is installed on the chemicals supplying line and sucks the chemicals from the discharging end of the nozzle. The sensor detects the location and the state of the chemicals in the nozzle. The nozzle includes a part made of a transparent material. The sensor is arranged on the external side of the nozzle and includes a camera which obtains captured images from the part made of the transparent material. [Reference numerals] (940) Control unit |
