| 摘要 |
PURPOSE: A mask is provided to irradiate the surface of a target to be irradiated with light having superior linearity under uniform illumination. CONSTITUTION: A mask includes a permeable thin film layer(101) and a metal layer(102). The thickness of the permeable thin film layer is in a range between 10 and 300 micron. One or more openings(1021) are formed on the metal layer and guides light to a target to be irradiated. The permeable thin film layer is a permeable ceramic layer. A method for manufacturing the mask includes a step for forming the metal layer on the surface of the permeable thin film layer. |
