发明名称 Oscillator-amplifier drive laser with seed protection for an EUV light source
摘要 As disclosed herein, in a first aspect, a device may comprise: an oscillator producing a light output on a beam path; a target material for interaction with light on the beam path at an irradiation site; a beam delay on the beam path the beam delay having a beam folding optical arrangement; and a switch positioned along the beam path and interposed between the oscillator and the beam delay; the switch closable to divert at least a portion of light on the beam path from the beam path, the switch having close time, t1 and the beam path having a length, L1, along the path from the switch to the irradiation site; with t1<cL1, where c is the speed of light on the path, to protect the oscillator.
申请公布号 US8462425(B2) 申请公布日期 2013.06.11
申请号 US201113077757 申请日期 2011.03.31
申请人 HOU KAI-CHUNG;SANDSTROM RICHARD L.;PARTLO WILLIAM N.;BROWN DANIEL J. W.;FOMENKOV IGOR V.;CYMER, INC. 发明人 HOU KAI-CHUNG;SANDSTROM RICHARD L.;PARTLO WILLIAM N.;BROWN DANIEL J. W.;FOMENKOV IGOR V.
分类号 H01S3/00;G02B5/22;G02F1/33;G06K7/10;H05G2/00 主分类号 H01S3/00
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