| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a laser processing apparatus having a parallelism adjusting function which can easily adjust the parallelism of laser beam oscillated by a laser oscillator. <P>SOLUTION: The laser processing apparatus includes a beam diameter adjusting unit 64 provided between a laser oscillator 62 for pulse laser beam and a focusing unit 63, an optical path length changing mirror 65 for changing an optical path length by directing a laser beam having passed to the focusing unit, a mirror positioning unit 66 positioning the laser beam at an operation position for guiding the laser beam to the focusing unit 63 and a non-operation position for guiding the laser beam to a detection path, an imaging unit 69 detecting the beam diameter of the laser beam directed to the detection path, an optical path length changing unit 70 changing the optical path length of the imaging unit 69, and a controller controlling the imaging unit 69, the beam diameter adjusting unit 64, and the optical path length changing unit 70. The controller operates to move the imaging unit 69 to two positions where different optical path lengths are provided, detect the beam diameters of the laser beam at the two positions, and controls the beam diameter adjusting unit 64 according to the two beam diameters detected above so that the two beam diameters have a predetermined relation. <P>COPYRIGHT: (C)2013,JPO&INPIT |
