| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a light irradiation apparatus which controls flowing-in of air between a treatment object substrate and a lamp, so that the light is irradiated towards the treatment object substrate with high efficiency. <P>SOLUTION: The light irradiation apparatus includes a lamp house which has an excimer lamp built-in for radiating light towards one side of the treatment object substrate to be transported along a substrate transport passage, and a gas supplying means for supplying an inert gas between the treatment object substrate and the excimer lamp. The light irradiation apparatus has a pressure buffer space formed adjacent to the lamp house upstream of the lamp house in the substrate transport passage, wherein an air discharge means for discharging the air flowing along one side where the light in the treatment object substrate is irradiated, is arranged upstream of the pressure buffer space in the substrate transport passage. <P>COPYRIGHT: (C)2013,JPO&INPIT |
