APPARATUS FOR PROCESSING SUBSTRATE

摘要

PURPOSE: A substrate processing apparatus is provided to constantly supply a wafer to different process module when one process module is out of order, and to improve productivity. CONSTITUTION: A load port(110) includes a container(111) for receiving a wafer(10). A process module includes a process unit(131,133) for treating the wafer and a wafer transfer part(135) for moving the wafer. The process module comprises a first process module(130) and a second process module. An index(120) temporarily accommodates the processed wafer. A control unit(150) controls the wafer transfer part to move the wafer of the load port to a process module. [Reference numerals] (150) Control unit; (160) User interface