METHOD OF DRIVING A ROBOT ARM

摘要

PURPOSE: A method for driving a robot arm is provided to induce the front inclination of the wafer regardless of external variables by changing speeds according to each area and operating the robot arm. CONSTITUTION: A wafer is picked up. A first area(S1) is operated with a first speed(v1) in an arm forwarding operation. A second area(S2) is operated with a second speed(v2) different from the first speed. The second speed is lower than the first speed. The front inclination of the wafer is induced by difference of the first and the second speed. [Reference numerals] (AA) Starting point; (BB) Robot arm forwarding