| 摘要 |
PURPOSE: A sputtering device is provided to easily cool a magnet by circulating a cooling fluid to the inner part of a housing. CONSTITUTION: A pair of targets is fixed to both sides of a deposition target in a vacuum chamber(20). A pair of housings(10) is fixed to the outside of the deposition target. The housing consists of a through hole, a cover, and a backing plate. A motor(50) is inserted into the housing. A supporter(51) fixes and supports a motor. |
