PIEZOELECTRIC ACTUATOR, INKJET HEAD ASSEMBLY, AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide piezoelectric actuators in which drive electrodes are accurately and firmly coupled to a flexible printed circuit so that the drive electrodes are provided in a flat manner.

SOLUTION: The piezoelectric actuators include upper and lower electrodes 127 and 123, which provide drive voltages, and piezoelectric elements 125, which are formed by solidifying a piezoelectric solution between the upper and lower electrodes 127 and 123 and providing drive force to the ink respectively in a plurality of pressure chambers 114 provided in an inkjet head 100. Each of the piezoelectric elements 125 is composed of the piezoelectric actuator 120 including a branch part individually provided above each of a plurality of pressure chambers 114 and a large-area part coupled to and integrally provided with each of the plurality of branch parts by a first end of the branch part.

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