| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electrostatic actuator that accumulates electrostatic energy as mechanical elastic energy, and performs highly-efficient mechanical operation by using the elastic energy. <P>SOLUTION: The electrostatic actuator includes: a movable electrode 2 capable of changing in position and shape through elastic deformation; a fixed electrode 3 arranged at a fixed position at a certain distance from the movable electrode; movement limiting means 4 for limiting movement of the movable electrode so as to prevent the movable electrode and fixed electrode from coming into electric contact with each other; and a driving power source 9 which applies a voltage to between the movable electrode and fixed electrode to displace the movable electrode toward the fixed electrode by using electrostatic power. In a movement region 2a in which the movement is limited by the movement limiting means, the movable electrode is in a shape for accumulating elastic energy by elastic bending deformation, and the driving power source applies a voltage larger than a voltage at which the movement limiting means starts limiting the movement of the movable electrode, to between the movable electrode and fixed electrode. <P>COPYRIGHT: (C)2013,JPO&INPIT |
