摘要 |
<P>PROBLEM TO BE SOLVED: To provide a silicon substrate on which a restrictor is formed, a method for manufacturing the silicon substrate, and an inkjet print head equipped with this. <P>SOLUTION: The silicon substrate 200 includes a first connective part 210 which is connected to a manifold and has a first width of a first size, a second connective part 220 which is connected to a pressure chamber and has a second width of a second size, and a restrictor part 230 which connects the first connective part 210 and the second connective part 220 and has a third width of a third size smaller than the first size or the second size. A boundary part where the restrictor part 230 and the first connective part, or the restrictor part 230 and the second connective part, are connected together is formed in the shape of a curved line. <P>COPYRIGHT: (C)2013,JPO&INPIT |