| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a technique that enables imaging a principal surface of a transparent plate-like object from the other principal surface side through the object without any problem even if, in particular, the object is thin. <P>SOLUTION: The upper face 510 of a suction stage 51 that holds a blanket BL by suction, and the upper face 520 of a quartz window 52a that allows imaging an alignment pattern AP2 from below are arranged not to be coplanar and the upper face 520 of the quartz window 52a is recessed down. Thus, interference fringes, which are generated by partial contact of the blanket BL and the quartz window 52a, can be prevented from appearing in the image. The pressure in a gap space GS formed above the upper face 520 of the quartz window 52a is adjusted through a gas passage 518 and a valve V53 in order to prevent the vacuum-sucked blanket BL from being sucked into the gap space GS to deform. <P>COPYRIGHT: (C)2013,JPO&INPIT |
