| 摘要 |
<P>PROBLEM TO BE SOLVED: To efficiently, stably and uniformly form a film on a substrate using a two-fluid spray. <P>SOLUTION: A film forming device includes: a housing; a plurality of spray nozzles 12 for spraying mist, for which a solution of a film forming material and a compressed gas are mixed and the film forming material is made into fine particles, to the inside of the housing; and a gas pressure adjusting mechanism for adjusting the compressed gas to a plurality of pressure control gases of different pressures, introducing one of the plurality of pressure control gases to each of the plurality of spray nozzles 12, and introducing all of the plurality of pressure control gases to the plurality of spray nozzles 12. <P>COPYRIGHT: (C)2013,JPO&INPIT |
